描述
Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless Steel配置
無配置OEM 代工型號說明
The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 7 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138656
晶圓尺寸:
2"/50mm, 3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
790
類別
Dry / Plasma Etch
上次驗證: 7 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138656
晶圓尺寸:
2"/50mm, 3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless Steel配置
無配置OEM 代工型號說明
The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.文檔
無文檔