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MATTSON / STEAG / AST 3000

描述

Single Chamber RTP with 3 Load/unloaders - Operational Condition

配置

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEM 代工型號說明

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

文檔

文件圖示

Mattson. AST3000,mov.mov

文件圖示

MattsonAST3000.mov

文件圖示

Mattson AST3000.mov

文件圖示

Mattson. AST3000.mov

文件圖示

Mattson AST3000 .mov

文件圖示

MattsonAST3000 .mov

MATTSON / STEAG / AST

3000

verified-listing-icon

已驗證

類別

RTP/RTA

上次驗證: 超過60天前

關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

59225

晶圓尺寸:

8"/200mm

年份:

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

類似上架商品

MATTSON / STEAG / AST 3000

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年份: 2000條件: 二手

上次驗證超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

年份: 2002條件: 二手

上次驗證超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

年份: 0條件: 二手

上次驗證超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

年份: 0條件: 二手

上次驗證超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

年份: 2007條件: 二手

上次驗證超過60天前

MATTSON / STEAG / AST

3000

verified-listing-icon

已驗證

類別

RTP/RTA

上次驗證: 超過60天前

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關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

59225

晶圓尺寸:

8"/200mm

年份:

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

描述

Single Chamber RTP with 3 Load/unloaders - Operational Condition

配置

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEM 代工型號說明

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

文檔

文件圖示

Mattson. AST3000,mov.mov

文件圖示

MattsonAST3000.mov

文件圖示

Mattson AST3000.mov

文件圖示

Mattson. AST3000.mov

文件圖示

Mattson AST3000 .mov

文件圖示

MattsonAST3000 .mov

類似上架商品

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA年份: 2000條件: 二手上次驗證:超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA年份: 2002條件: 二手上次驗證:超過60天前

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RTP/RTA年份: 0條件: 二手上次驗證:超過60天前

MATTSON / STEAG / AST 3000

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RTP/RTA年份: 0條件: 二手上次驗證:超過60天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA年份: 2007條件: 二手上次驗證:超過60天前