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MATTSON / STEAG / AST 3000
    描述
    Single Chamber RTP with 3 Load/unloaders - Operational Condition
    配置
    RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
    OEM 代工型號說明
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    文檔
    文件圖示

    Mattson. AST3000,mov.mov

    文件圖示

    MattsonAST3000.mov

    文件圖示

    Mattson AST3000.mov

    文件圖示

    Mattson. AST3000.mov

    文件圖示

    Mattson AST3000 .mov

    文件圖示

    MattsonAST3000 .mov

    MATTSON / STEAG / AST

    3000

    verified-listing-icon

    已驗證

    類別
    RTP/RTA

    上次驗證: 超過60天前

    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    59225

    晶圓尺寸:

    8"/200mm

    年份:

    2000

    Have Additional Questions?
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    Available
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    MATTSON / STEAG / AST 3000

    MATTSON / STEAG / AST

    3000

    RTP/RTA
    年份: 2000條件: 二手
    上次驗證超過60天前
    MATTSON / STEAG / AST 3000

    MATTSON / STEAG / AST

    3000

    RTP/RTA
    年份: 2002條件: 二手
    上次驗證超過60天前
    MATTSON / STEAG / AST 3000

    MATTSON / STEAG / AST

    3000

    RTP/RTA
    年份: 0條件: 二手
    上次驗證5 天前
    MATTSON / STEAG / AST 3000

    MATTSON / STEAG / AST

    3000

    RTP/RTA
    年份: 0條件: 二手
    上次驗證超過60天前
    MATTSON / STEAG / AST 3000

    MATTSON / STEAG / AST

    3000

    RTP/RTA
    年份: 2007條件: 二手
    上次驗證超過60天前

    MATTSON / STEAG / AST

    3000

    verified-listing-icon
    已驗證
    類別
    RTP/RTA
    上次驗證: 超過60天前
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    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    59225

    晶圓尺寸:

    8"/200mm

    年份:

    2000

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    Single Chamber RTP with 3 Load/unloaders - Operational Condition
    配置
    RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
    OEM 代工型號說明
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    文檔
    文件圖示

    Mattson. AST3000,mov.mov

    文件圖示

    MattsonAST3000.mov

    文件圖示

    Mattson AST3000.mov

    文件圖示

    Mattson. AST3000.mov

    文件圖示

    Mattson AST3000 .mov

    文件圖示

    MattsonAST3000 .mov

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