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MATTSON / STEAG / AST 3000
    描述
    Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)
    配置
    Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)
    OEM 代工型號說明
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    文檔
    文件圖示

    Mattson AST3000 .pdf

    MATTSON / STEAG / AST

    3000

    verified-listing-icon

    已驗證

    類別
    RTP/RTA

    上次驗證: 超過60天前

    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    59880

    晶圓尺寸:

    8"/200mm, 12"/300mm

    年份:

    未知

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
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    年份: 2002條件: 二手
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    年份: 0條件: 二手
    上次驗證超過60天前
    MATTSON / STEAG / AST 3000

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    RTP/RTA
    年份: 0條件: 二手
    上次驗證超過60天前
    MATTSON / STEAG / AST 3000

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    上次驗證超過60天前

    MATTSON / STEAG / AST

    3000

    verified-listing-icon
    已驗證
    類別
    RTP/RTA
    上次驗證: 超過60天前
    listing-photo-11574f2260f74c159302b6b9ae9c23c2-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/46558/11574f2260f74c159302b6b9ae9c23c2/d58498e3a3444410bfd10522301b0215_9b2454eb3fe14ebabc295ac32ccfe3a51201a_mw.jpeg
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    listing-photo-11574f2260f74c159302b6b9ae9c23c2-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/46558/11574f2260f74c159302b6b9ae9c23c2/6ac3cb56f5984e659346d54eba34bd86_0dab9f3068e64952b77def8cc3439f07_mw.jpeg
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    listing-photo-11574f2260f74c159302b6b9ae9c23c2-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/46558/11574f2260f74c159302b6b9ae9c23c2/ee7e22e53c23462da102a05d8106174b_e5a3b1a390e44d29b5d47ea0ce3c783f_mw.jpeg
    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    59880

    晶圓尺寸:

    8"/200mm, 12"/300mm

    年份:

    未知

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)
    配置
    Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)
    OEM 代工型號說明
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    文檔
    文件圖示

    Mattson AST3000 .pdf

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    查看全部
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