描述
i-Line Stepper配置
-Software version 2.31D -Wafer Type Notch -Track/Wafer Interface Wafer loader Track Type None -Track Model None -Wafer Interface Cassette -Installation Type Stand-Alone -Wafer Chuck Type Pin -Reticle Size 5" -Reticle Cassette Type BOX -Additional Reticle Library None -Lamp Manufacturer Ushio -CE Marked? YES -CE Mark Declaration YES -Date of Last PM Dec-22 -Lamp Age (hours) 10374 -System Status On-Line -Can Produce Wafers as-is? YES -OEM Audit Available? NO -3rd Party Audit Available? NO -Decontamination Report? NO -All cabling present? YES -# of Signal Tower Colors 3 -Wafer loader Type 3OEM 代工型號說明
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.文檔
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NIKON
NSR-2205i12D
已驗證
類別
Steppers & Scanners
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
104430
晶圓尺寸:
8"/200mm
年份:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i12D
類別
Steppers & Scanners
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
104430
晶圓尺寸:
8"/200mm
年份:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
i-Line Stepper配置
-Software version 2.31D -Wafer Type Notch -Track/Wafer Interface Wafer loader Track Type None -Track Model None -Wafer Interface Cassette -Installation Type Stand-Alone -Wafer Chuck Type Pin -Reticle Size 5" -Reticle Cassette Type BOX -Additional Reticle Library None -Lamp Manufacturer Ushio -CE Marked? YES -CE Mark Declaration YES -Date of Last PM Dec-22 -Lamp Age (hours) 10374 -System Status On-Line -Can Produce Wafers as-is? YES -OEM Audit Available? NO -3rd Party Audit Available? NO -Decontamination Report? NO -All cabling present? YES -# of Signal Tower Colors 3 -Wafer loader Type 3OEM 代工型號說明
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.文檔
無文檔