描述
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1. Check intensity: ① Average value: 577.186 ② Uniformity: 1.306 (≤ 2.5%) 2. Light source energy (mj): ① 100 msec: 50.3 ② 200 msec: 100.5 ③ 400 msec: 200.7 ④ 800 msec: 401.5 3. Flatness test: ① Max-Min (≤ 3um): 1.77 ② Local flatness (≤ 1um): 0.74 4. Chip leveling: ① X (≤ 1.5 sec): 1 ② Y (≤ 1.5 sec): -0.735 Update: X: -5 → -9 Y: -5 → -3 Chip leveling: ① X (≤ 1.5 sec): 0.332 ② Y (≤ 1.5 sec): 0.028 5. BST test (≤ 0.5um): 0.231 6. Stepping (≤ 0.07um): X: 0.035 / Y: 0.036 7. Pre-alignment: Average (X: 8.358 / Y: 20.167 / T: 27.028) 3δ (X: 4.975 / Y: 7.056 / T: 7.154) 8. Overlay: LSA: X+ (Mean + 3δ) = 119.1 Y+ (Mean + 3δ) = 167.6 Update: X: 0.366 → 0.376 Y: 0.658 → 0.684 Rmag: 0.2264 → 0.2364 Overlay: LSA: X+ (Mean + 3δ) = 94.2 Y+ (Mean + 3δ) = 162.1 9. DIS MAX X = 0.034 Y = 0.045 MIN X = -0.034 Y = -0.021 10. INC: UR-UL: -0.143 UL-LR: -0.131OEM 代工型號說明
The NSR-2205i11D offers a resolution of 350nm or better and features a numerical aperture (NA) of 0.63. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system is equipped with the LSA alignment system as standard, and optionally offers the FIA and LIA alignment systems.文檔
類別
Steppers & Scanners
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
142604
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i11D
類別
Steppers & Scanners
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
142604
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available