描述
RTP配置
RTPOEM 代工型號說明
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.文檔
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MATTSON
HELIOS
已驗證
類別
RTP/RTA
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
75663
晶圓尺寸:
12"/300mm
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATTSON
HELIOS
已驗證
類別
RTP/RTA
上次驗證: 17 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
75663
晶圓尺寸:
12"/300mm
年份:
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
RTP配置
RTPOEM 代工型號說明
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.文檔
無文檔