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描述
無描述配置
無配置OEM 代工型號說明
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.文檔
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MATTSON
HELIOS
類別
RTP/RTA
上次驗證: 超過60天前
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條件:
Used
作業狀態:
未知
產品編號:
80916
晶圓尺寸:
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年份:
未知
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描述
無描述配置
無配置OEM 代工型號說明
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.文檔
無文檔