描述
AlCu & Ti sputter deposition cluster tool配置
Platform: Brooks MX800 Process capability: AlCu / Ti (HIS-Modul) / degas / soft etch Peripherals: (Qty 2) Edwards L70 (Qty 2) Brooks CTI 9600 Upgraded from 6” to 8” in 2008 HIS-Module upgrade in 2021, incl. Artic chiller (-20 °C) I/O boards upgraded in 2021 Software upgraded in 2021 Turbo pumps replaced on loadlocks in 2021 Documentation available (incl. upgrade features) PM3: •DC sputtering source: ARQ151 •Currently running Aluminum-Copper Alloy (AlCu) DC-Sputter deposition process •300 mm target size •Operating at 8 kW process power •Process temperature: 270°C (Chuck Operating Temperature 300°C) PM4: •PVD sputtering source: ARQ151, upgraded for HiPIMS operation •Equipped with a 130 mm hub •Cold chuck with Arctic Chiller cooling system •Currently mounted with a 300 mm Titanium target for DC sputtering processOEM 代工型號說明
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類別
PVD / Sputtering
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154591
晶圓尺寸:
8"/200mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200
類別
PVD / Sputtering
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154591
晶圓尺寸:
8"/200mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
AlCu & Ti sputter deposition cluster tool配置
Platform: Brooks MX800 Process capability: AlCu / Ti (HIS-Modul) / degas / soft etch Peripherals: (Qty 2) Edwards L70 (Qty 2) Brooks CTI 9600 Upgraded from 6” to 8” in 2008 HIS-Module upgrade in 2021, incl. Artic chiller (-20 °C) I/O boards upgraded in 2021 Software upgraded in 2021 Turbo pumps replaced on loadlocks in 2021 Documentation available (incl. upgrade features) PM3: •DC sputtering source: ARQ151 •Currently running Aluminum-Copper Alloy (AlCu) DC-Sputter deposition process •300 mm target size •Operating at 8 kW process power •Process temperature: 270°C (Chuck Operating Temperature 300°C) PM4: •PVD sputtering source: ARQ151, upgraded for HiPIMS operation •Equipped with a 130 mm hub •Cold chuck with Arctic Chiller cooling system •Currently mounted with a 300 mm Titanium target for DC sputtering processOEM 代工型號說明
未提供文檔
無文檔