描述
Reactor配置
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM 代工型號說明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文檔
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
已驗證
類別
Epitaxial deposition (EPI)
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
84555
晶圓尺寸:
未知
年份:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
已驗證
類別
Epitaxial deposition (EPI)
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
84555
晶圓尺寸:
未知
年份:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Reactor配置
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM 代工型號說明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文檔
無文檔