描述
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Detail Attached Below AMAT Centura HTF 3ch Epi system (ATM or RP) System is stripped down to the frame Frame is cleaned, prepared and Power-coated Transfer chamber is cleaned and Ni-plated Loadlock shells and parts are cleaned and Ni-plated if needed Loadlocks are disassembled and completely rebuilt HP robot is rebuilt and upgraded to HP+ with ceramic bearings Epi chamber completely rebuilt and finished NEW Base ring (wall) is cleaned, tested, and electro-polished NEW Upper and lower clamps are cleaned, tested, and electro-polished NEW Half clamps are cleaned and electro-polished NEW Lamp modules NEW Lamps NEW Gold parts NEW Quartz NEW Graphite NEW Rotate assembly is disassembled and completely rebuilt with NEW bearings, NEW seals, and NEW bellows Gas Panel Completely NEW Gas Panel Enclosure NEW Valves are NEW Filters NEW MFCs are NEW Flow restrictors are NEW Regulators and transducers NEW LDMs NEW All gas lines are NEW All air and water lines NEW All O-rings and seals NEW Flow Point controller and valve NEW (we are the OEM) Blowers NEW Upper AC NEW System controller is completely rebuilt, SCR NEW, Breaker NEW System is fully Tier I tested including heating up lamps before shipping Not included * Scrubbers * PumpsOEM 代工型號說明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文檔
APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
已驗證
類別
Epitaxial deposition (EPI)
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
60731
晶圓尺寸:
8"/200mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
已驗證
類別
Epitaxial deposition (EPI)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
60731
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available