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STS MULTIPLEX ICP
    描述
    M/PLEX Multiplex ICP Etcher
    配置
    Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
    OEM 代工型號說明
    The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
    文檔

    無文檔

    類別
    Dry / Plasma Etch

    上次驗證: 超過30天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    126234


    晶圓尺寸:

    3"/75mm


    年份:

    2001


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    STS

    MULTIPLEX ICP

    verified-listing-icon
    已驗證
    類別
    Dry / Plasma Etch
    上次驗證: 超過30天前
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    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    126234


    晶圓尺寸:

    3"/75mm


    年份:

    2001


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    M/PLEX Multiplex ICP Etcher
    配置
    Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
    OEM 代工型號說明
    The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
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