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STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
描述
M/PLEX Multiplex ICP Etcher
配置
Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
OEM 代工型號說明
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
文檔

無文檔

類別
Dry / Plasma Etch

上次驗證: 4 天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

126234


晶圓尺寸:

3"/75mm


年份:

2001


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STS

MULTIPLEX ICP

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已驗證
類別
Dry / Plasma Etch
上次驗證: 4 天前
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關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

126234


晶圓尺寸:

3"/75mm


年份:

2001


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描述
M/PLEX Multiplex ICP Etcher
配置
Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
OEM 代工型號說明
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
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