描述
Metal Etch配置
Software: Envision 2.0-068 Main Chamber - Fixed Gap ESC - Metal Etch ESC - Anodized Aluminum VAT 65 Pressure Controller Leybold Mag1500 High Temp Turbo PLL - DSQ Strip Chamber APM - Atmospheric passivation Heated Paddle (1) Orbital Weld Gas Box (2) - Unit UFC 1200A (2) - Unit 1661 Multiflow (3) - Horiba Z500 (1) - Horiba Z300 (1) - Celerity VC-4900VRH Lam Harmonic arm drives (2) Dry Pumps: Busch BA100 (1) Edwards iQDP80 (1) Edwards iQDP80 w/Leybold WSU501 Blower (1) Chillers: M and W Single Ch TCU - RPCX28A-3.OHE-RNB Remote AC Box Delatech SD101 Wet ScrubberOEM 代工型號說明
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
119772
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
TCP 9600SE
類別
Dry / Plasma Etch
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
119772
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Metal Etch配置
Software: Envision 2.0-068 Main Chamber - Fixed Gap ESC - Metal Etch ESC - Anodized Aluminum VAT 65 Pressure Controller Leybold Mag1500 High Temp Turbo PLL - DSQ Strip Chamber APM - Atmospheric passivation Heated Paddle (1) Orbital Weld Gas Box (2) - Unit UFC 1200A (2) - Unit 1661 Multiflow (3) - Horiba Z500 (1) - Horiba Z300 (1) - Celerity VC-4900VRH Lam Harmonic arm drives (2) Dry Pumps: Busch BA100 (1) Edwards iQDP80 (1) Edwards iQDP80 w/Leybold WSU501 Blower (1) Chillers: M and W Single Ch TCU - RPCX28A-3.OHE-RNB Remote AC Box Delatech SD101 Wet ScrubberOEM 代工型號說明
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.文檔
無文檔