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LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
  • LAM RESEARCH CORPORATION TCP 9600SE
描述
無描述
配置
-Robot type: Shuttle film collection Shuttle film collection -Software: Classic -Materials etched: Metal metal -List of process gases:CL2/BCL3/O2/HE/SF6/N2/CF4 -Etch process: Metal etching metal etching -Contains two chambers: One for etching; A glue remover. Containing molecular sieve contains two chambers: one for etching; one for glue remover. Contains molecular sieves.
OEM 代工型號說明
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.
文檔

無文檔

類別
Dry / Plasma Etch

上次驗證: 昨日

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

119511


晶圓尺寸:

6"/150mm


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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LAM RESEARCH CORPORATION

TCP 9600SE

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已驗證
類別
Dry / Plasma Etch
上次驗證: 昨日
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關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

119511


晶圓尺寸:

6"/150mm


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述
配置
-Robot type: Shuttle film collection Shuttle film collection -Software: Classic -Materials etched: Metal metal -List of process gases:CL2/BCL3/O2/HE/SF6/N2/CF4 -Etch process: Metal etching metal etching -Contains two chambers: One for etching; A glue remover. Containing molecular sieve contains two chambers: one for etching; one for glue remover. Contains molecular sieves.
OEM 代工型號說明
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.
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