描述
Darkfield inspection配置
-Software Version: Windows -CIM: Yes -Process: Wafer scanning -Main System TESTER SIDE (1) -Handler System WAFER HANDLER SYSTEM (1) -Factory Interface FOUP (2) -Auxillary Rack (1)OEM 代工型號說明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.文檔
無文檔
KLA
AIT XUV
已驗證
類別
Defect Inspection
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
113031
晶圓尺寸:
12"/300mm
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
AIT XUV
類別
Defect Inspection
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
113031
晶圓尺寸:
12"/300mm
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Darkfield inspection配置
-Software Version: Windows -CIM: Yes -Process: Wafer scanning -Main System TESTER SIDE (1) -Handler System WAFER HANDLER SYSTEM (1) -Factory Interface FOUP (2) -Auxillary Rack (1)OEM 代工型號說明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.文檔
無文檔