描述
Main System - INSPECTION UNIT Handler System - Robot Factory Interface - FOUP Others - Pillar配置
Software Version - 6.3.24.3 CIM - SECS/GEM Process - Darkfield InspectionOEM 代工型號說明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.文檔
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KLA
AIT XUV
類別
Defect Inspection
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
146761
晶圓尺寸:
12"/300mm
年份:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Main System - INSPECTION UNIT Handler System - Robot Factory Interface - FOUP Others - Pillar配置
Software Version - 6.3.24.3 CIM - SECS/GEM Process - Darkfield InspectionOEM 代工型號說明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.文檔
無文檔