描述
Includes: 4ea SUSS media storage tanks; 1ea SUSS media control box; 2ea Julabo F30-CL recirculating chillers; 2ea Julabo FC600S recirculating chillers; LCD monitor; power cabinet.配置
6in wafer, 400V, 3ph, 60Hz, w/ Gencobot 7S/3L transfer robot; nDeveloper module; solvent Developer module; coater module; thermal module w/ 2ea hotplates, 1ea chillplate; Kontron controller.OEM 代工型號說明
"The ACS200Plus is a versatile spin coating and developing system designed for round wafers (2 inches to 200 mm) and square substrates (2 inches to 6 inches). It excels in various techniques like spin coating, spray coating, baking, and developing for applications including thin/thick adhesives and photosensitive polymers. It meets the demands of cutting-edge photoresist processes in optoelectronics, MEMS, and advanced packaging. With its modular design, the ACS200Plus offers flexibility for R&D, trial production, and mass production. Configurable with 2, 4, or 6 process modules around a central manipulator, it allows for scalability by adding additional modular units. The optional GYRSET module creates a uniform coating environment by minimizing disturbances and forming solvent-rich coatings. For a comprehensive lithography solution, the ACS200Plus can be combined with the MA200Compact mask alignment lithography machine to form the integrated LithoFab200 system."文檔
無文檔
類別
Coaters & Developers
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147464
晶圓尺寸:
未知
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SUSS MicroTec / KARL SUSS
ACS200 Plus
類別
Coaters & Developers
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147464
晶圓尺寸:
未知
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Includes: 4ea SUSS media storage tanks; 1ea SUSS media control box; 2ea Julabo F30-CL recirculating chillers; 2ea Julabo FC600S recirculating chillers; LCD monitor; power cabinet.配置
6in wafer, 400V, 3ph, 60Hz, w/ Gencobot 7S/3L transfer robot; nDeveloper module; solvent Developer module; coater module; thermal module w/ 2ea hotplates, 1ea chillplate; Kontron controller.OEM 代工型號說明
"The ACS200Plus is a versatile spin coating and developing system designed for round wafers (2 inches to 200 mm) and square substrates (2 inches to 6 inches). It excels in various techniques like spin coating, spray coating, baking, and developing for applications including thin/thick adhesives and photosensitive polymers. It meets the demands of cutting-edge photoresist processes in optoelectronics, MEMS, and advanced packaging. With its modular design, the ACS200Plus offers flexibility for R&D, trial production, and mass production. Configurable with 2, 4, or 6 process modules around a central manipulator, it allows for scalability by adding additional modular units. The optional GYRSET module creates a uniform coating environment by minimizing disturbances and forming solvent-rich coatings. For a comprehensive lithography solution, the ACS200Plus can be combined with the MA200Compact mask alignment lithography machine to form the integrated LithoFab200 system."文檔
無文檔