描述
Automated Photoresist Coater配置
Auto Suss MicroTec ACS 200 Plus consisting of: - Model: ACS 200 Plus - Suss E-Rack - Qty 2 Cybor Control Module - Julabo F-30CL Chiller - Julabo FC600S Chiller - Qty 2 Coater Waste Tanks - Gencobot 7S/3L Wafer Handling Robot Modules consisting of: - Module 1: Coater - Module 2: Coater - Module 3: Developer - Module 4: Temp ModuleOEM 代工型號說明
"The ACS200Plus is a versatile spin coating and developing system designed for round wafers (2 inches to 200 mm) and square substrates (2 inches to 6 inches). It excels in various techniques like spin coating, spray coating, baking, and developing for applications including thin/thick adhesives and photosensitive polymers. It meets the demands of cutting-edge photoresist processes in optoelectronics, MEMS, and advanced packaging. With its modular design, the ACS200Plus offers flexibility for R&D, trial production, and mass production. Configurable with 2, 4, or 6 process modules around a central manipulator, it allows for scalability by adding additional modular units. The optional GYRSET module creates a uniform coating environment by minimizing disturbances and forming solvent-rich coatings. For a comprehensive lithography solution, the ACS200Plus can be combined with the MA200Compact mask alignment lithography machine to form the integrated LithoFab200 system."文檔
無文檔
SUSS MicroTec / KARL SUSS
ACS200 Plus
已驗證
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
60650
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SUSS MicroTec / KARL SUSS
ACS200 Plus
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
60650
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Automated Photoresist Coater配置
Auto Suss MicroTec ACS 200 Plus consisting of: - Model: ACS 200 Plus - Suss E-Rack - Qty 2 Cybor Control Module - Julabo F-30CL Chiller - Julabo FC600S Chiller - Qty 2 Coater Waste Tanks - Gencobot 7S/3L Wafer Handling Robot Modules consisting of: - Module 1: Coater - Module 2: Coater - Module 3: Developer - Module 4: Temp ModuleOEM 代工型號說明
"The ACS200Plus is a versatile spin coating and developing system designed for round wafers (2 inches to 200 mm) and square substrates (2 inches to 6 inches). It excels in various techniques like spin coating, spray coating, baking, and developing for applications including thin/thick adhesives and photosensitive polymers. It meets the demands of cutting-edge photoresist processes in optoelectronics, MEMS, and advanced packaging. With its modular design, the ACS200Plus offers flexibility for R&D, trial production, and mass production. Configurable with 2, 4, or 6 process modules around a central manipulator, it allows for scalability by adding additional modular units. The optional GYRSET module creates a uniform coating environment by minimizing disturbances and forming solvent-rich coatings. For a comprehensive lithography solution, the ACS200Plus can be combined with the MA200Compact mask alignment lithography machine to form the integrated LithoFab200 system."文檔
無文檔