描述
無描述配置
- # of HMDS chamber (VPO): 1 - # of hotplates: 8 - # of chill plates: 2 - # of coaters: 2 - # of develop bowl: 2 - # of resist lines each bowl: 3 - # of develop line each bowl: 2:DEV (binary , fan spray), 2: DI (binary, fan spray), 1:N2 - # of CPD, for small sample dispense and coating: 2 - Configured for 200mm Wafers, but is 150mm capable - Vintage: 2022 - As Is, Where Is, Ex-work - HDD is included. - End user is responsible for flushing, system module deinstallation, rigging, and crating. Flushing Process: - Use PGMEA to purge the chemicals out. - Then Acetone and/or PGMEA soak the line for 1-2 days. - Then Acetone or PGmEA to purge and empty the line and dry.OEM 代工型號說明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.文檔
無文檔
類別
Coaters & Developers
上次驗證: 2 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
150817
晶圓尺寸:
8"/200mm
年份:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
ACS200 Gen3
類別
Coaters & Developers
上次驗證: 2 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
150817
晶圓尺寸:
8"/200mm
年份:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
- # of HMDS chamber (VPO): 1 - # of hotplates: 8 - # of chill plates: 2 - # of coaters: 2 - # of develop bowl: 2 - # of resist lines each bowl: 3 - # of develop line each bowl: 2:DEV (binary , fan spray), 2: DI (binary, fan spray), 1:N2 - # of CPD, for small sample dispense and coating: 2 - Configured for 200mm Wafers, but is 150mm capable - Vintage: 2022 - As Is, Where Is, Ex-work - HDD is included. - End user is responsible for flushing, system module deinstallation, rigging, and crating. Flushing Process: - Use PGMEA to purge the chemicals out. - Then Acetone and/or PGMEA soak the line for 1-2 days. - Then Acetone or PGmEA to purge and empty the line and dry.OEM 代工型號說明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.文檔
無文檔