描述
無描述配置
Electric Power: Voltage: 400V 3-phase + N + PE Power: 16 kVA Frequency: 50 Hz AIC: 100 kA / 400 VAC FLC: 23 A SCCR: 5 kA Max. Single Load: 5.5 A Pneumatic Connections: CDA (Air): 6 bar ±10% Nitrogen (N₂): 6 bar ±10% Vacuum (VAC): -0.8 bar ±0.1% DIW (Deionized Water): — bar Compliance: CE MarkedOEM 代工型號說明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.文檔
無文檔
類別
Coaters & Developers
上次驗證: 18 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137018
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
ACS200 Gen3
類別
Coaters & Developers
上次驗證: 18 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137018
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Electric Power: Voltage: 400V 3-phase + N + PE Power: 16 kVA Frequency: 50 Hz AIC: 100 kA / 400 VAC FLC: 23 A SCCR: 5 kA Max. Single Load: 5.5 A Pneumatic Connections: CDA (Air): 6 bar ±10% Nitrogen (N₂): 6 bar ±10% Vacuum (VAC): -0.8 bar ±0.1% DIW (Deionized Water): — bar Compliance: CE MarkedOEM 代工型號說明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.文檔
無文檔