描述
無描述配置
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM 代工型號說明
未提供文檔
無文檔
AKRION
REARMOUNT
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132896
晶圓尺寸:
6"/150mm
年份:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM 代工型號說明
未提供文檔
無文檔