描述
無描述配置
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 代工型號說明
未提供文檔
無文檔
AKRION
REARMOUNT
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132894
晶圓尺寸:
6"/150mm
年份:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 代工型號說明
未提供文檔
無文檔