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描述
無描述配置
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 代工型號說明
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)文檔
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NIKON
NSR-SF200
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
53557
晶圓尺寸:
8"/200mm
年份:
2003
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描述
無描述配置
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 代工型號說明
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)文檔
無文檔