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描述
無描述配置
無配置OEM 代工型號說明
Step-and-Repeat Scanning System NSR-S207D, a lens-scanning KrF excimer stepper for mass production of 110nm advanced devices incorporating an ultra-high N.A. lens. The NSR-S207D incorporates an ultra-high N.A. (N.A.O.82) projection lens, for the KrF excimer laser (248nm wavelength), and uses a newly developed body to significantly improve throughput performance and alignment accuracy.文檔
無文檔
NIKON
NSR-S207D
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
114763
晶圓尺寸:
未知
年份:
未知
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描述
無描述配置
無配置OEM 代工型號說明
Step-and-Repeat Scanning System NSR-S207D, a lens-scanning KrF excimer stepper for mass production of 110nm advanced devices incorporating an ultra-high N.A. lens. The NSR-S207D incorporates an ultra-high N.A. (N.A.O.82) projection lens, for the KrF excimer laser (248nm wavelength), and uses a newly developed body to significantly improve throughput performance and alignment accuracy.文檔
無文檔