描述
Resolution =0.35um Long Term Focus Stability Within + 0.2um 0. 4um pattern(CE) Average Value from previous days="3" 0. 4um Magnification Control Vs. Lens Heating Within 0. 02um NIKON standard LC Test Condition (Heat & Cool Test) Auto focus repeatability +0. 1um Total Focus Deviation 0.0 35um 0. 4um V/H pattern 5pts 0. 4um V/H 5 Lens distortion Within +0.05um Max expose filed 22.0x22.0mm 3days 3 measurement 3 Reticle blind setting accuracy +0. 4 to +0. 8mm on reticle NIKON standard Test Condition Exposure power 650mw/cm2 new lamp Integrated exposure control within I 1.0% input time: 100msec 200msec 400msec Illumination uniformity Within 1.4% 3 times measurement with exposure area Reticle rotation +3o<20um Nikon standard Test condition Nikon Array orthogonality Within +0. 1sec After software compensation After software compensation Stepping precision Within 0. 45um (3g) Nikon standard test Nikon standard test Alignment accuracy (1) LSA (2) FIA (1) M +3o<0.06 (2) M +3o<0.065 10 points EGA 10 points EGA Stepping rate 27sec or less (150mm) Exposure time: 130msec Exposure time: 130msec Wafer pre-alignment 2 repeatability 3g <15um 20 times measurement for x,y and 6 on same wafer times measurement for x,y and 6 on same wafer Chip leveling accuracy Within +1. 5sec 10 times measurement 10 times measurement Wafer System Operation Test >99% 200Wafers 200Wafers Reticle System Operation Test 100% Each 1 time for every slot 1 time for every slot Wafer flatness 2. 5um Nikon standard test Nikon standard test配置
See attachment in DocumentsOEM 代工型號說明
For 350 nm Device Mass Production Thanks to the employment of new, highly enhanced illumination, along with a reduction in stepping and alignment time, the NSR-2205i14E2 features a high throughput of 103 wafers per hour (for 200 mm wafers).文檔
NIKON
NSR-2205i14E2
已驗證
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
114967
晶圓尺寸:
8"/200mm
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i14E2
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
114967
晶圓尺寸:
8"/200mm
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available