概述

S-3700N is designed as a new series of Tungsten-type VP-SEM to accommodate sample diameters up to 300mm using a new large specimen chamber and a large specimen stage. Moreover, simultaneous accommodations of accessory attachments for EDX, WDX and EBSP (*1) analyses are possible at optimized analytical geometry. The specimen stage has a wide traverse range for observation of sample areas up to 203mm diameter and up to 110mm height with EDX and WDX analysis.