描述
Magnification: 15 to 100,000 times (may vary depending on observation mode, object, and installation environment.) • Acceleration voltage: 0.5kV to 20kV Observed image: Secondary electrons Observation mode: High vacuum Image file formats: TIFF, JPG • Maximum sample size: 64mm in diameter • In-room observation function: Viewport color camera • 5-axis sample stage: X32mm, Y32mm, Z8-30mm, rotation 360 degrees, tilt -10 to +90 degrees The XY axes are motorized and can be operated from the console. ・Power supply: AC100V±10%, 50/60Hz, 1500VA or less • External dimensions: Main unit (width 395 x height 975 x depth 650 mm) Vacuum pump (500mm wide x 365mm high x 170mm deep) • Weight: Main unit approximately 150 kg, vacuum pump approximately 30 kg配置
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KEYENCE
VE7800
類別
SEM / FIB
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
145093
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Magnification: 15 to 100,000 times (may vary depending on observation mode, object, and installation environment.) • Acceleration voltage: 0.5kV to 20kV Observed image: Secondary electrons Observation mode: High vacuum Image file formats: TIFF, JPG • Maximum sample size: 64mm in diameter • In-room observation function: Viewport color camera • 5-axis sample stage: X32mm, Y32mm, Z8-30mm, rotation 360 degrees, tilt -10 to +90 degrees The XY axes are motorized and can be operated from the console. ・Power supply: AC100V±10%, 50/60Hz, 1500VA or less • External dimensions: Main unit (width 395 x height 975 x depth 650 mm) Vacuum pump (500mm wide x 365mm high x 170mm deep) • Weight: Main unit approximately 150 kg, vacuum pump approximately 30 kg配置
無配置OEM 代工型號說明
未提供文檔
無文檔