描述
Dual beam Focused Ion Beam Scanning Electron Microscope (FIB-SEM)配置
Resolution: SEM: 1.0 nm at 15 kV FIB: 5 nm at 40 kV FIB Column: Ga Ion source: >50 nA 2-Stage electro static lens system Octopole electro static lens system Pattern generator system: 4K x 4K SEM Column: Maximum beam current: >30 nA 3-Stage electro magnetic lens reduction system Electro static blanking system SE Power supply Image memory: 2560 x 1920 Vacuum system: Turbo molecular pump Dry pump Ion source chamber Electron gun (2) Buffer tanks Micro-sampling system: 3-Axis motor drive system X Range: 1 mm Y Range: 2 mm Z Range: 2.5 mm Chamber scope: LCD Monitor, 7" Stand IR Camera Power cable AC / DC Adaptor Air compressor N2 Gas leak system Multi-stage control panel Console control unit Power supply unit AC Power distribution Transformer Laser sample height adjust tool Manual sample height adjust tool Interlock function PC Processor: INTEL i7 Flat panel LCD Monitor, 22" Mouse Keyboard Control panel RAM: 16 GB Hard Disk Drive (HDD): 500 GB Does not include EDS Operating system: Windows 7, 64-BitOEM 代工型號說明
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HITACHI
NB5000
類別
SEM / FIB
上次驗證: 16 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
138358
晶圓尺寸:
未知
年份:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Dual beam Focused Ion Beam Scanning Electron Microscope (FIB-SEM)配置
Resolution: SEM: 1.0 nm at 15 kV FIB: 5 nm at 40 kV FIB Column: Ga Ion source: >50 nA 2-Stage electro static lens system Octopole electro static lens system Pattern generator system: 4K x 4K SEM Column: Maximum beam current: >30 nA 3-Stage electro magnetic lens reduction system Electro static blanking system SE Power supply Image memory: 2560 x 1920 Vacuum system: Turbo molecular pump Dry pump Ion source chamber Electron gun (2) Buffer tanks Micro-sampling system: 3-Axis motor drive system X Range: 1 mm Y Range: 2 mm Z Range: 2.5 mm Chamber scope: LCD Monitor, 7" Stand IR Camera Power cable AC / DC Adaptor Air compressor N2 Gas leak system Multi-stage control panel Console control unit Power supply unit AC Power distribution Transformer Laser sample height adjust tool Manual sample height adjust tool Interlock function PC Processor: INTEL i7 Flat panel LCD Monitor, 22" Mouse Keyboard Control panel RAM: 16 GB Hard Disk Drive (HDD): 500 GB Does not include EDS Operating system: Windows 7, 64-BitOEM 代工型號說明
未提供文檔
無文檔