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描述
ANALYTICAL EQUIPMENT配置
Imaging: 1.0nm at 15kV WD 4mm 1.6nm at 1kV 1.5mm deceleration mode 2.5nm at 1kV 1.5nm standard mode Magnification: Low Mag mode: 25 – 2,000x High Mag mode: 100- 800,000x Electron Optics: ZrO/W Schottky emission Probe current >200nA at 30kV Specimen Stage: 5 Axis motorization, X: 110mm, Y: 110mm, Z: 1.5 – 40mm, T: -5 to +70, R: 360 deg 150 mm Load LockOEM 代工型號說明
Analytical UHR Schottky Emission Scanning Electron Microscope Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Schottky electron gun. It features not only ultra-high resolution (1.0nm/15kV, 1.6nm/Kv (*)) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging derived from Hitachi’s highly reputed Super ExB filter technology. The Schottky electron gun enables a wide variety of analytical capabilities due to its high probe current (100nA).文檔
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HITACHI
SU-70
類別
SEM / FIB
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
36388
晶圓尺寸:
未知
年份:
未知
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描述
ANALYTICAL EQUIPMENT配置
Imaging: 1.0nm at 15kV WD 4mm 1.6nm at 1kV 1.5mm deceleration mode 2.5nm at 1kV 1.5nm standard mode Magnification: Low Mag mode: 25 – 2,000x High Mag mode: 100- 800,000x Electron Optics: ZrO/W Schottky emission Probe current >200nA at 30kV Specimen Stage: 5 Axis motorization, X: 110mm, Y: 110mm, Z: 1.5 – 40mm, T: -5 to +70, R: 360 deg 150 mm Load LockOEM 代工型號說明
Analytical UHR Schottky Emission Scanning Electron Microscope Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Schottky electron gun. It features not only ultra-high resolution (1.0nm/15kV, 1.6nm/Kv (*)) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging derived from Hitachi’s highly reputed Super ExB filter technology. The Schottky electron gun enables a wide variety of analytical capabilities due to its high probe current (100nA).文檔
無文檔