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描述
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Vacuum type：Oil pump*1, TMP*1 stage type：3 axes motorized stage PS/OS：Windows XP Detector：Upper secondary electron detector, Lower secondary electron detector UI：Operation2.7 EDS：Model HORIBA EDS 7593-H Resolution 137eV Det.Area 10mm2OEM 代工型號說明
The S-4800 is an advanced Field Emission Scanning Electron Microscope (FE-SEM) that builds upon the proven performance of its predecessors, the S-4700 and S-5200. With beam deceleration technology, it achieves an impressive resolution of 1.4 nm at 1 kV and 1.0 nm at 15 kV. The microscope features a semi-in-lens detector design, allowing for the examination of large samples without compromising ultra-high resolution at low accelerating voltages. The innovative objective lens design incorporates Hitachi's Super ExB filter technology, which effectively separates pure secondary electrons (SE), compositional SE, and backscattered electron (BSE) signals. With a specimen diameter of 200 mm and a 5-axis motorized eucentric stage, it offers exceptional sample accommodation and positioning capabilities. The S-4800 is compatible with optional accessories such as Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscatterted Diffraction Pattern (EBDP) systems, making it suitable for a range of ultra-high resolution applications in fields like semiconductor research, materials studies, and nanotechnology.文檔
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HITACHI
S-4800
類別
SEM / FIB
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
107210
晶圓尺寸:
未知
年份:
2007
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描述
無描述配置
Vacuum type：Oil pump*1, TMP*1 stage type：3 axes motorized stage PS/OS：Windows XP Detector：Upper secondary electron detector, Lower secondary electron detector UI：Operation2.7 EDS：Model HORIBA EDS 7593-H Resolution 137eV Det.Area 10mm2OEM 代工型號說明
The S-4800 is an advanced Field Emission Scanning Electron Microscope (FE-SEM) that builds upon the proven performance of its predecessors, the S-4700 and S-5200. With beam deceleration technology, it achieves an impressive resolution of 1.4 nm at 1 kV and 1.0 nm at 15 kV. The microscope features a semi-in-lens detector design, allowing for the examination of large samples without compromising ultra-high resolution at low accelerating voltages. The innovative objective lens design incorporates Hitachi's Super ExB filter technology, which effectively separates pure secondary electrons (SE), compositional SE, and backscattered electron (BSE) signals. With a specimen diameter of 200 mm and a 5-axis motorized eucentric stage, it offers exceptional sample accommodation and positioning capabilities. The S-4800 is compatible with optional accessories such as Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscatterted Diffraction Pattern (EBDP) systems, making it suitable for a range of ultra-high resolution applications in fields like semiconductor research, materials studies, and nanotechnology.文檔
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