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描述
ANALYTICAL EQUIPMENT配置
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEM 代工型號說明
Field Emission Scanning Electron Microscope文檔
無文檔
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HITACHI
S-4800 II
類別
SEM / FIB
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
23573
晶圓尺寸:
8"/200mm
年份:
2004
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描述
ANALYTICAL EQUIPMENT配置
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEM 代工型號說明
Field Emission Scanning Electron Microscope文檔
無文檔