描述
Scanning Electron Microscope (SEM)配置
Pump and chiller Known issues: Turbopump requires replacement High stability Schottky field emission gun; Fast chamber evacuation: 2 min; 0.2 to 30 kV; Beam deceleration with stage bias from -150 V to -4 kV; Lowest landing energy 50 V; Optimal high vacuum image resolution: 1.6 nm at 1 kV; 1.0 nm at 15 kV; High vacuum SED, in-lens (TLD), EDX, vCD (high sensitivity low kV BSE) detectors; Optimal low vacuum image resolution: 2.0 nm; Low vacuum LVD, LVD/Helix, GAD (TV-rate solid-state BSE), EDX, vCD (high sensitivity low kV BSE) detectors; 5-axes motorized stage; z axis movable up to 60 mm; -5°/+70° tiltOEM 代工型號說明
未提供文檔
無文檔
類別
SEM / FIB
上次驗證: 12 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153433
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
THERMOFISHER SCIENTIFIC / FEI / PHILIPS
NOVA NANOSEM 430
類別
SEM / FIB
上次驗證: 12 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153433
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Scanning Electron Microscope (SEM)配置
Pump and chiller Known issues: Turbopump requires replacement High stability Schottky field emission gun; Fast chamber evacuation: 2 min; 0.2 to 30 kV; Beam deceleration with stage bias from -150 V to -4 kV; Lowest landing energy 50 V; Optimal high vacuum image resolution: 1.6 nm at 1 kV; 1.0 nm at 15 kV; High vacuum SED, in-lens (TLD), EDX, vCD (high sensitivity low kV BSE) detectors; Optimal low vacuum image resolution: 2.0 nm; Low vacuum LVD, LVD/Helix, GAD (TV-rate solid-state BSE), EDX, vCD (high sensitivity low kV BSE) detectors; 5-axes motorized stage; z axis movable up to 60 mm; -5°/+70° tiltOEM 代工型號說明
未提供文檔
無文檔