描述
Lamp annealer配置
無配置OEM 代工型號說明
The Centura RTP XE is a Rapid Thermal Processing system introduced in 1997. It features improved productivity, higher throughput, and reduced power consumption. It also includes the TempMatchTM temperature calibration tool for precise temperature matching among multiple chambers and systems. New applications include In-Situ Steam Generation, Nitric Oxide nitridation for gate dielectrics, and BPSG reflow capability. The system is available for both 200mm and 300mm applications, delivering process uniformity for 0.18mm devices and slip-free results up to 1100°C at a rate of 100°C/sec.文檔
無文檔
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132674
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
CENTURA RTP XE
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132674
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Lamp annealer配置
無配置OEM 代工型號說明
The Centura RTP XE is a Rapid Thermal Processing system introduced in 1997. It features improved productivity, higher throughput, and reduced power consumption. It also includes the TempMatchTM temperature calibration tool for precise temperature matching among multiple chambers and systems. New applications include In-Situ Steam Generation, Nitric Oxide nitridation for gate dielectrics, and BPSG reflow capability. The system is available for both 200mm and 300mm applications, delivering process uniformity for 0.18mm devices and slip-free results up to 1100°C at a rate of 100°C/sec.文檔
無文檔