描述
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.配置
無配置OEM 代工型號說明
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System文檔
無文檔
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
121010
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
EXPLORER 14
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
121010
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.配置
無配置OEM 代工型號說明
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System文檔
無文檔