Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System

DENTON VACUUM

EXPLORER 14

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Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.

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EXPLORER 14

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DENTON VACUUM

EXPLORER 14

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EXPLORER 14

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