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描述
無描述配置
the DI board, Cryo control board, and C3 lift driver are either missing or defective. The configuration of the endura's sputter chambers is as follows: W 2ch and WSi 1ch. It does not include PreClean or PreHeat. DP is included.OEM 代工型號說明
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文檔
無文檔
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116419
晶圓尺寸:
6"/150mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
ENDURA 5500
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116419
晶圓尺寸:
6"/150mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
the DI board, Cryo control board, and C3 lift driver are either missing or defective. The configuration of the endura's sputter chambers is as follows: W 2ch and WSi 1ch. It does not include PreClean or PreHeat. DP is included.OEM 代工型號說明
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文檔
無文檔