描述
Equipment Type Contact stylus surface profiler Measurement Method Contact stylus profilometry Max. Sample Size 254 mm Max. Scan Length 60 mm Vertical Range 13 µm to 300 µm Vertical Resolution 1 Å at 13 µm range; 25 Å at 300 µm range Scan Speed 1 µm/s to 25 mm/s Stylus Force 1–100 mg Typical Analysis Step height / Roughness / Waviness配置
無配置OEM 代工型號說明
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文檔
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KLA
P-10
類別
Profiler
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
153958
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Equipment Type Contact stylus surface profiler Measurement Method Contact stylus profilometry Max. Sample Size 254 mm Max. Scan Length 60 mm Vertical Range 13 µm to 300 µm Vertical Resolution 1 Å at 13 µm range; 25 Å at 300 µm range Scan Speed 1 µm/s to 25 mm/s Stylus Force 1–100 mg Typical Analysis Step height / Roughness / Waviness配置
無配置OEM 代工型號說明
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文檔
無文檔