描述
[2nd SOURCE NEW ONLY] ## Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-38438) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Stable and reliable up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for rapid heat-up and uniform distribution. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement. Temperature Uniformity: Excellent across the 8-inch surface for consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance in high-vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in high-volume fabs.配置
無配置OEM 代工型號說明
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類別
Parts
上次驗證: 5 天前
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled
產品編號:
145693
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
0010-38438
類別
Parts
上次驗證: 5 天前
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled
產品編號:
145693
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
[2nd SOURCE NEW ONLY] ## Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-38438) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Stable and reliable up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for rapid heat-up and uniform distribution. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement. Temperature Uniformity: Excellent across the 8-inch surface for consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance in high-vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in high-volume fabs.配置
無配置OEM 代工型號說明
未提供文檔
無文檔