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描述
E-beam Lithography system配置
無配置OEM 代工型號說明
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.文檔
無文檔
RAITH
e-LiNE
類別
Lithography
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
97741
晶圓尺寸:
未知
年份:
未知
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描述
E-beam Lithography system配置
無配置OEM 代工型號說明
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.文檔
無文檔