描述
HE-Ion Implanter Comes with pumps and chillers配置
-High energy batch implant tool, 200mm capability -Energy range 10 – 3750keV -10-site-disk → 10 wafers per batch @200mm wafer diameter, automatic handling system, -Fully automated gas box → 4 gas modules •Argon (factory inlet), •PH3 SDS® •AsH3 SDS® •BF3 SDS® -On-Board-Argon option installed (semi automated filling of stripper reservoirs), -SECS/GEM Factory automation available, Software version 6.41OEM 代工型號說明
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APPLIED MATERIALS (AMAT) / VARIAN
KESTREL
已驗證
類別
High Current
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
111719
晶圓尺寸:
未知
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT) / VARIAN
KESTREL
類別
High Current
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
111719
晶圓尺寸:
未知
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available