APPLIED MATERIALS (AMAT) / VARIAN VIISta TRIDENT XP

描述

Ion implantater

配置

Build/pickup strategy: DB-DPU Process: Standard Scan harness: Standard - continuous Beamline: XP Profiler: Gen II Multipixel 2-piece cup Process chamber line kit: Full coverage Seismic kit: Installed Chiller: SMC Remote 20M Differential pumping: Standard Cryo pump: OBIS 320FX Power kit: Standard with 3-pole 175 A UPS: Standard 3 kVA UPS Frequency: 60 Hz Injector kit: XP (LDPL), vapor ready Control system: Hard disk drives Label kit: Chinese Load lock vent: Standard finish Load lock vent connection: Standard-finish vent connection Elevator chamber: Standard - TGV with PEEK Orienter: Laser, belt drive Remote harness kit: 20M-Rem Harn/Heli-1S2000V Roughing pump supply: Customer-supplied pumps onsite Rough pump type: Edwards iGX100MTi - iGX100L Rough pump exhaust: Universal RP exhaust - floor Turbo pump supply: Customer-supplied pumps onsite Turbo pump type: Pfeiffer HI-PACE 2300 Wafer handler side window kit: Installed VCS software package: VCS 9.XX (latest revision) Plasma flood gun: XP-Standard Gas box: 10-position Gas box exhaust: 10 Stk CJB Dual Exh FM4910 - Up Manometer: Quad Mano 10Stk GB, 0-1000 Pa Gas sticks - Slot 1: HP Ar/N2 CGA 580 Gas sticks - Slot 2: PraxAir Boron VCR 1/4 Gas sticks - Slot 3: PraxAir Arsine Gas sticks - Slot 4: PraxAir Phosphine Gas sticks - Slot 5: Praxair CO (NSR) Gas sticks - Slot 6: PraxAir GeF4 Gas sticks - Slot 7: Praxair Boron VCR 1/4 (NSR) Gas sticks - Slot 8: XeH2 Gas sticks - Slot 9: HP N2 CGA 580 Purge assembly - Slots 7 and 10: N2 with external feed, 10-stick SS gaskets: All gas sticks, 10-stick gas box