描述
無描述配置
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 代工型號說明
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.文檔
無文檔
類別
High Current
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106506
晶圓尺寸:
8"/200mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT) / VARIAN
E1000
類別
High Current
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106506
晶圓尺寸:
8"/200mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 代工型號說明
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.文檔
無文檔