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描述
DIFF配置
無配置OEM 代工型號說明
SONORA is a 300mm batch vertical furnace for logic/foundry and memory applications, as well as 300mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal wafer processing. Atmospheric thermal applications include diffusion and activation of dopants, annealing to affect material properties by heating to a specific temperature, and oxidation to form silicon oxide. LPCVD applications include polysilicon, silicon nitride, and silicon oxide.文檔
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ASM
SONORA
類別
Furnaces / Diffusion
上次驗證: 超過30天前
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條件:
Used
作業狀態:
未知
產品編號:
123755
晶圓尺寸:
未知
年份:
未知
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描述
DIFF配置
無配置OEM 代工型號說明
SONORA is a 300mm batch vertical furnace for logic/foundry and memory applications, as well as 300mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal wafer processing. Atmospheric thermal applications include diffusion and activation of dopants, annealing to affect material properties by heating to a specific temperature, and oxidation to form silicon oxide. LPCVD applications include polysilicon, silicon nitride, and silicon oxide.文檔
無文檔