
描述
KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool · Dual 300 mm Loadports · Analysis of 190nm-800nm Wavelengths · White Light Reflectometer · Broadband Spectroscopic Ellipsometer · Single Wave Ellipsometer · Stress Measurement · iDesorber配置
無配置OEM 代工型號說明
The Aleris 8350 is a high-performance film metrology system that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film thickness measurement system is used for advanced film development, characterization and process control for a wide range of critical films, including ultra-thin diffusion layers, ultra-thin gate oxides, advanced photoresists, 193nm ARC layers, ultra-thin multi-layer stacks, and CVD layers.文檔
無文檔
類別
Elipsometry
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132907
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ALERIS 8350
類別
Elipsometry
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132907
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool · Dual 300 mm Loadports · Analysis of 190nm-800nm Wavelengths · White Light Reflectometer · Broadband Spectroscopic Ellipsometer · Single Wave Ellipsometer · Stress Measurement · iDesorber配置
無配置OEM 代工型號說明
The Aleris 8350 is a high-performance film metrology system that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film thickness measurement system is used for advanced film development, characterization and process control for a wide range of critical films, including ultra-thin diffusion layers, ultra-thin gate oxides, advanced photoresists, 193nm ARC layers, ultra-thin multi-layer stacks, and CVD layers.文檔
無文檔