描述
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A配置
無配置OEM 代工型號說明
未提供文檔
無文檔
ULVAC
NE-950EX
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
79016
晶圓尺寸:
未知
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
NE-950EX
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
79016
晶圓尺寸:
未知
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A配置
無配置OEM 代工型號說明
未提供文檔
無文檔