描述
ICP RIE Cluster Tool, 3-chamber. Includes: 1ea control cabinet w/ PDUs/control computers; 2ea control cabinets w/ PDUs, Leybold Mag Drive 1000 controller, VAT PM-7 adaptive pressure controller; 6ea ENI Genesis-series RF generators; 4ea ENI ACG-10B RF generators; 2ea Ebara A25S vacuum pumps; 2ea Thermo Neslab Merlin M75 recirculating chillers. Missing turbopumps.配置
無配置OEM 代工型號說明
STS Multiplex is a type of etcher that offers a large range of materials etching possibility such as insulators (SiO2, Si3N4 and SiC), silicon, metals (Al Alloys, Pt, Ti) and some polymers. It is dedicated for etching metals (processes under chlorine chemistry), quartz (fluorine/carbonate chemistry) and polyimide (oxygen chemistry). STS offers a range of different platform options, each compatible with all STS process technologies. The Multiplex has a single process chamber with manually loaded vacuum loadlock and carousel wafer handler for 2-4 wafers.文檔
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STS
MULTIPLEX
類別
Dry / Plasma Etch
上次驗證: 17 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
149270
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
ICP RIE Cluster Tool, 3-chamber. Includes: 1ea control cabinet w/ PDUs/control computers; 2ea control cabinets w/ PDUs, Leybold Mag Drive 1000 controller, VAT PM-7 adaptive pressure controller; 6ea ENI Genesis-series RF generators; 4ea ENI ACG-10B RF generators; 2ea Ebara A25S vacuum pumps; 2ea Thermo Neslab Merlin M75 recirculating chillers. Missing turbopumps.配置
無配置OEM 代工型號說明
STS Multiplex is a type of etcher that offers a large range of materials etching possibility such as insulators (SiO2, Si3N4 and SiC), silicon, metals (Al Alloys, Pt, Ti) and some polymers. It is dedicated for etching metals (processes under chlorine chemistry), quartz (fluorine/carbonate chemistry) and polyimide (oxygen chemistry). STS offers a range of different platform options, each compatible with all STS process technologies. The Multiplex has a single process chamber with manually loaded vacuum loadlock and carousel wafer handler for 2-4 wafers.文檔
無文檔