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Parameter DSE IV Specification Si Etch Rate (µm/min) ≥7.5 Etch Depth 350 µm CD size 1020 x 1020 µm Aspect ratio 1:3 Si exposed area ~70% Si: PR Selectivity >100:1 Si: Si02 Selectivity >150:1 Sidewall profile 90 ± 20 Sidewall roughness (µm) <2 Within wafer Non-uniformity @ 6" <±5% excluding edge exclusion 6mmOEM 代工型號說明
"The PLASMA-THERM VERSALINE ICP is an Inductive Couple Plasma (ICP) etch platform that has been developed over decades of technological evolution at Plasma-Therm®. It offers high flexibility for application-optimized processes, with a large library of processes for a variety of applications, including wireless, photonics, power devices, compound semiconductors, memory, quantum, and advanced packaging. The platform can handle a wide range of materials, including II-VIs and III-Vs, silicon-based materials, dielectrics, polymers, metals, metal oxides and nitrides, and piezoelectrics. It also supports corrosive chemistry with corrosion-resistant components. The hardware of the VERSALINE ICP is flexible and configurable, with options for handling cassette cluster systems or single-substrate loadlocks. It features a 2MHz ICP source that is heated for process stability and decreased first wafer effects, as well as increased MTBC. The substrate bias can be 13.56MHz or an optional 40MHz, and the substrate temperature can be controlled with backside helium using mechanical or electrostatic clamping. The platform also offers application-specific substrate electrode temperature ranges. The VERSALINE ICP is controlled by the Cortex control system and supports the EndpointWorks program for laser, optical emission, and other system parameter-based endpoints."文檔
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled / Crated
產品編號:
109525
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
VERSALINE ICP
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled / Crated
產品編號:
109525
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available