描述
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.配置
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147928
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 COBRA
類別
Dry / Plasma Etch
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147928
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.配置
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEM 代工型號說明
未提供文檔
無文檔