描述
Cobra 300 ICP+PECVD配置
Cl₂ (Chlorine) N₂ (Nitrogen) CHF₃ (Trifluoromethane) N₂O (Nitrous Oxide) NH₃ (Ammonia) CF₄ (Carbon Tetrafluoride) SF₆ (Sulfur Hexafluoride) BCl₃ (Boron Trichloride) SiCl₄ (Silicon Tetrachloride) SiH₄/N₂ (Silane in Nitrogen, 5% mixture) Ar (Argon) H₂ (Hydrogen)OEM 代工型號說明
未提供文檔
無文檔
類別
Dry / Plasma Etch
上次驗證: 16 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137003
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 COBRA
類別
Dry / Plasma Etch
上次驗證: 16 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137003
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Cobra 300 ICP+PECVD配置
Cl₂ (Chlorine) N₂ (Nitrogen) CHF₃ (Trifluoromethane) N₂O (Nitrous Oxide) NH₃ (Ammonia) CF₄ (Carbon Tetrafluoride) SF₆ (Sulfur Hexafluoride) BCl₃ (Boron Trichloride) SiCl₄ (Silicon Tetrachloride) SiH₄/N₂ (Silane in Nitrogen, 5% mixture) Ar (Argon) H₂ (Hydrogen)OEM 代工型號說明
未提供文檔
無文檔