描述
Dielectric Etch配置
Tool Status: Chamber has been shut down and deinstalled and moved to the warehouse. Configuration. Audit to verify. LAM FXP Chamber only with RF unit and gas box.OEM 代工型號說明
The 2300 Exelan Flex is a dielectric etch solution that extends the capabilities of the 2300 Exelan to address manufacturing challenges for 200 mm and 300 mm while providing advanced capabilities for future manufacturing needs. It incorporates Dual Frequency Confined™ (DFC™) technology and the Waferless AutoClean™ process, with additional technology that allows customers to address future production challenges via increased 193 nm photoresist compatibility, enhanced uniformity and CD control, and enlarged process windows. The 2300 Exelan Flex’s innovative technology has been production proven at numerous leading IC manufacturers.文檔
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LAM RESEARCH CORPORATION
2300 EXELAN FLEX
已驗證
類別
Dry / Plasma Etch
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
23058
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
2300 EXELAN FLEX
類別
Dry / Plasma Etch
上次驗證: 15 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
23058
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Dielectric Etch配置
Tool Status: Chamber has been shut down and deinstalled and moved to the warehouse. Configuration. Audit to verify. LAM FXP Chamber only with RF unit and gas box.OEM 代工型號說明
The 2300 Exelan Flex is a dielectric etch solution that extends the capabilities of the 2300 Exelan to address manufacturing challenges for 200 mm and 300 mm while providing advanced capabilities for future manufacturing needs. It incorporates Dual Frequency Confined™ (DFC™) technology and the Waferless AutoClean™ process, with additional technology that allows customers to address future production challenges via increased 193 nm photoresist compatibility, enhanced uniformity and CD control, and enlarged process windows. The 2300 Exelan Flex’s innovative technology has been production proven at numerous leading IC manufacturers.文檔
無文檔