描述
Particle Counter配置
- 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Resolution - Accuracy within 1% - XY coordinates - Lock Down accessories - Tencor approved blower assembly - 30mW New Ar-Laser - 208V/60HZ, 17A - MS-DOS 6.22 ,Windows 3.1 - Software version: 2.1OEM 代工型號說明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文檔
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KLA
SURFSCAN 6200
已驗證
類別
Defect Inspection
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
103607
晶圓尺寸:
8"/200mm
年份:
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SURFSCAN 6200
已驗證
類別
Defect Inspection
上次驗證: 13 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
103607
晶圓尺寸:
8"/200mm
年份:
1994
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Particle Counter配置
- 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Resolution - Accuracy within 1% - XY coordinates - Lock Down accessories - Tencor approved blower assembly - 30mW New Ar-Laser - 208V/60HZ, 17A - MS-DOS 6.22 ,Windows 3.1 - Software version: 2.1OEM 代工型號說明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文檔
無文檔